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Published on 21 April 2021

EBARA is a leading global manufacturer of vacuum and semiconductor systems used in the semiconductor industry for manufacturing wafers, liquid crystals, solar cells and other products requiring advanced technology. EBARA Precision Machinery Europe (EPME) is part of the Japanese EBARA Group and employs approximately 170 people in Europe. The portfolio includes dry and turbo molecular vacuum pumps as well as gas abatement systems. In addition, EPME sells state-of-the-art CMP tools, wafer bevel polishing and substrate plating systems. In Europe, EPME has a central warehouse and two overhaul centres for vacuum pumps.
  • Contact: EBARA Precision Machinery Europe GmbH
  • Muehlweg 2c, 82054 Sauerlach, Germany,