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Tuesday, October 13, 2020 | 08:30 - 12:30
CEA-Leti's R&D pilot line is a set of best-in-class clean-room facilities running 24/7 and offering recognized expertise covering all the key fields of core process technologies: lithography, bonding, deposition, epitaxy growth, CMP… Fully equipped with a state-of-the-art toolset, the pilot line covers the full range of services from materials to a complete functional device.
Indeed, material science is essential for bringing new functionalities at device level in microelectronics and photonics. Material selection, deposition and integration strategy require careful development to reach industrial maturity that takes into account cost of ownership and device functionality constraints. Furthermore, the prototyping pilot line can support the development of multiple technologies for a broad band of applications.
These include advanced CMOS, memory, quantum computing, photonics and M&NEMS. This advanced manufacturing cluster is supported by a nano-characterization ecosystem offering the complete possibility to model, characterize and optimize device performance. On the operational side, CEA-Leti has deployed a shuttle lot strategy on its key core technologies to quickly raise technology manufacturing maturity and ensure faster technology transfer. This approach is compatible with the institute's multi-project wafer program that allows its partners to validate technology solutions on their private designs and devices.
This workshop will highlight some of CEA-Leti's very recent material developments targeting the introduction of sustainability material and it will describe the institute's clean-room environment, explaining how its manufacturing know-how is dedicated to helping our partners achieve their goals for device performance, maturity and cycle-time performance.
Co-General Chairs : Laurent Pain and Fabrice Nemouchi, CEA-Leti
Tuesday, October 13, 2020
CEA is a French government-funded technological research organisation in four main areas: low-carbon energies, defense and security, information technologies and health technologies. A prominent player in the European Research Area, it is involved in setting up collaborative projects with many partners around the world.