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Sébastien Hentz


Published on 12 November 2020


Sébastien Hentz

Director of research, CEA-Leti

​Schedule Time

  • 4:30 p.m: merging optics and mechanics to sense the fifth dimension 


In the past 7 years, CEA-Leti has developed high-performance silicon sensors by merging its MEMS and photonics capabilities into one large-scale platform. The institute has extensive expertise in silicon nanomechanical resonators for sensing, culminating with a start-up for chemical sensing in 2012. It also largely contributed to the emergence of silicon photonics. In this talk we will explain how cavity optomechanics-based sensors have been developed for inertial, biological and mass sensing as well as atomic force microscopy, with the objective of making them as mainstream as their electrical counterparts.


  • Prior to joining CEA-Leti as a scientist in 2004, Sébastien was a post-doctoral Marie-Curie fellow at Politecnico di Milano. His first research projects at CEA-Leti dealt with MEMS-based inertial sensing as well as the study of the non-linear dynamics in silicon micro- and nanomechanical resonators. 
  • This work led to a generic platform for MEMS sensing. In parallel, he actively contributed to the development of NEMS at the institute, in particular for chemical sensing. He was visiting scientist at Caltech in 2010-2011 and received an ERC Consolidator grant in 2013 to study NEMS-based mass spectrometry and optomechanics. He was appointed CEA-Leti's Director of Research in 2018. He is the author of more than 60 articles (Science, Nature Nanotechnology, h-index 20 from ISI-web), and holds nearly 30 patents, a third of which are licensed to industry. He received his Ph.D. degree in computational mechanics from Université Grenoble Alpes in 2003.